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Design and Modeling of MEMS Based Nano Displacement PZT Sensing Element

by P.A. Manoharan, D. Nedumaran
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International Journal of Computer Applications
Foundation of Computer Science (FCS), NY, USA
Volume 40 - Number 13
Year of Publication: 2012
Authors: P.A. Manoharan, D. Nedumaran
10.5120/5043-7368

P.A. Manoharan, D. Nedumaran . Design and Modeling of MEMS Based Nano Displacement PZT Sensing Element. International Journal of Computer Applications. 40, 13 ( February 2012), 34-42. DOI=10.5120/5043-7368

@article{ 10.5120/5043-7368,
author = { P.A. Manoharan, D. Nedumaran },
title = { Design and Modeling of MEMS Based Nano Displacement PZT Sensing Element },
journal = { International Journal of Computer Applications },
issue_date = { February 2012 },
volume = { 40 },
number = { 13 },
month = { February },
year = { 2012 },
issn = { 0975-8887 },
pages = { 34-42 },
numpages = {9},
url = { https://ijcaonline.org/archives/volume40/number13/5043-7368/ },
doi = { 10.5120/5043-7368 },
publisher = {Foundation of Computer Science (FCS), NY, USA},
address = {New York, USA}
}
%0 Journal Article
%1 2024-02-06T20:28:00.949237+05:30
%A P.A. Manoharan
%A D. Nedumaran
%T Design and Modeling of MEMS Based Nano Displacement PZT Sensing Element
%J International Journal of Computer Applications
%@ 0975-8887
%V 40
%N 13
%P 34-42
%D 2012
%I Foundation of Computer Science (FCS), NY, USA
Abstract

Piezoelectric principles are widely used to harvest energy in the process of vibrating piezoelectric mass. Different design configurations were studied in the research papers listed. A novel dynamic method of Lead Zirconate Titanate Sensor (PZT) to obtain d33 suitable for the MEMS applications is designed, simulated and the analysed results were compared with the fabricated sensor. The Lead Zirconate Titanate Square Plate(PZTSP) fixed at the bottom, which is acted upon by the application of pressure to validate direct piezoelectric effect. This model develops the piezoelectric voltage in dynamic mode by suitably opening and closing the pressure inlet optimized time constant for one second. A prototype model is validated, which can be used for the pressure sensing and indicating applications.

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Index Terms

Computer Science
Information Sciences

Keywords

NANO Piezoelectric Sensor PZTSP MEMS PZT

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