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Design Optimization of Capacitive MEMS Accelerometer for Improved Sensitivity

IJCA Proceedings on International Conference on Emerging Trends in Informatics and Communication
© 2016 by IJCA Journal
ICETIC 2016 - Number 1
Year of Publication: 2016
Keya Sanyal
Kalyan Biswas

Keya Sanyal and Kalyan Biswas. Article: Design Optimization of Capacitive MEMS Accelerometer for Improved Sensitivity. IJCA Proceedings on International Conference on Emerging Trends in Informatics and Communication ICETIC 2016(1):11-14, September 2016. Full text available. BibTeX

	author = {Keya Sanyal and Kalyan Biswas},
	title = {Article: Design Optimization of Capacitive MEMS Accelerometer for Improved Sensitivity},
	journal = {IJCA Proceedings on International Conference on Emerging Trends in Informatics and Communication},
	year = {2016},
	volume = {ICETIC 2016},
	number = {1},
	pages = {11-14},
	month = {September},
	note = {Full text available}


In this paper design of a two-axis capacitive accelerometer is described. Variation of capacitance of the device with applied acceleration as well as sensitivity of the device is analyzed. The performance analysis of the device is done using ANSYS Multyphysics software. From the analysis results, a capacitive mems accelerometer with enhanced sensitivity has been proposed. The sensitivity of the accelerometer has efficiently been enhanced with the increase of beam length and reduction beam width.


  • Zha X. F. 2007. Database System for Design and Manufacturing of MEMS. Int. Journal of Adv. Manuf. Technol. , 32, pp. 378–392.
  • Ferrari V. , Ghisla A. , D. Marioli, A. Taroni. 2006. MEMS Accelerometer with Multiaxial Response by Dynamic Reconfiguration of Piezoresistive Bridges. Proceedings of Euro sensors XX Conference, Sweden, M2B-P18.
  • Krylov S. AUGUST 2010. Toward Sensitivity Enhancement of MEMS Accelerometers Using Mechanical Amplification Mechanism. IEEE SENSORS JOURNAL, VOL. 10, NO. 8, pp. 1311-1319.
  • Wen J. , Sarihan V. , Myers B. , and Li G. 2010. A Multidisciplinary Approach for Effective Packaging of MEMS Accelerometer. Proc. of Electronic Components and Technology conference (ECTC), Las Vegas, NV,USA, pp. 1173-1177.
  • Chen S. , Zhang W. 2008. A new type of MEMS two axis accelerometer based on silicon. IEEE international conference on Nano/Micro Engineered and Molecular Systems, Sanya, pp. 959-964.
  • Malingam S. , T. K, Juliet A. V. December 2009. Measuring low frequency vibration using MEMS based Accelerometer. Fifth International Conference on MEMS, NANO, and Smart Systems (ICMENS), UAE. pp. 162-165.
  • Ruan Y. , Ji L. J. , Tang Y. , Yao W. J. , Wang Z. Q. , Xu S. 2012. Design of a 5mW capacitive accelerometer based on MEMS and CMOS technology. 10th World congress on Intelligent Control and Automation (WCICA), Beijing, pp. 5102-5107.
  • Xu R. , Zhou S. , Li W. J. 2012. MEMS accelerometer based nonspecific-user Hand Gesture Recognition. IEEE Trans. On Sensors Journal, Vol. 12. no. 5, pp. 1166-1173.
  • Yong C. , Haslina, Yunus M. , Amziah N. . 2014. Design and analysis of capacitive comb acceleration sensor for automotive applications. The Second International Conference on Technological Advances in Electrical, Electronics and Computer Engineering (TAEECE2014). pp. 209-214.
  • Benmessaoud M. , Nasreddine M. M. 2013. Optimization of MEMS capacitive accelerometer", Microsystem Technology. Volume 19, Issue 5, pp 713–720.
  • Chawla T. , Kaur M. , Singh G. 2015. Design and sensitivity analysis of MEMS 3D capacitive comb type accelerometer. Industrial Instrumentation and Control (ICIC), International Conference on, pp. 965-970.
  • Aydemir A. , Akin T. 2015. Process Development for the Fabrication of a Three Axes Capacitive MEMS Accelerometer. Procedia Engineering, Volume 120, pp. 727-730.
  • Khamil, K. N. , Leong K. S. , Mohamad N. B. , Soin N. , Saba N. . 2015. Analysis of MEMS Accelerometer for Optimized Sensitivity. International Journal of Engineering and Technology. Vol 6, No 6, pp 2705-2711.
  • ANSYS Basic Analysis Guide, ANSYS Software version 14. 5, ANSYS INC.