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Design Optimization of Capacitive MEMS Accelerometer for Improved Sensitivity

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IJCA Proceedings on International Conference on Emerging Trends in Informatics and Communication
© 2016 by IJCA Journal
ICETIC 2016 - Number 1
Year of Publication: 2016
Authors:
Keya Sanyal
Kalyan Biswas

Keya Sanyal and Kalyan Biswas. Article: Design Optimization of Capacitive MEMS Accelerometer for Improved Sensitivity. IJCA Proceedings on International Conference on Emerging Trends in Informatics and Communication ICETIC 2016(1):11-14, September 2016. Full text available. BibTeX

@article{key:article,
	author = {Keya Sanyal and Kalyan Biswas},
	title = {Article: Design Optimization of Capacitive MEMS Accelerometer for Improved Sensitivity},
	journal = {IJCA Proceedings on International Conference on Emerging Trends in Informatics and Communication},
	year = {2016},
	volume = {ICETIC 2016},
	number = {1},
	pages = {11-14},
	month = {September},
	note = {Full text available}
}

Abstract

In this paper design of a two-axis capacitive accelerometer is described. Variation of capacitance of the device with applied acceleration as well as sensitivity of the device is analyzed. The performance analysis of the device is done using ANSYS Multyphysics software. From the analysis results, a capacitive mems accelerometer with enhanced sensitivity has been proposed. The sensitivity of the accelerometer has efficiently been enhanced with the increase of beam length and reduction beam width.

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