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Nanoporous Silicon Prepared by Vapour Phase Strain Etch and Sacrificial Technique

Published on December 2015 by Binoy Bera
journal_cover_thumbnail

International Conference on Microelectronic Circuit and System
Foundation of Computer Science USA
MICRO2015 - Number 1
December 2015
Authors: Binoy Bera
b44b8e58-97cf-435a-862a-7a3f31f3ebea

Binoy Bera . Nanoporous Silicon Prepared by Vapour Phase Strain Etch and Sacrificial Technique. International Conference on Microelectronic Circuit and System. MICRO2015, 1 (December 2015), 42-45.

@article{
author = { Binoy Bera },
title = { Nanoporous Silicon Prepared by Vapour Phase Strain Etch and Sacrificial Technique },
journal = { International Conference on Microelectronic Circuit and System },
issue_date = { December 2015 },
volume = { MICRO2015 },
number = { 1 },
month = { December },
year = { 2015 },
issn = 0975-8887,
pages = { 42-45 },
numpages = 4,
url = { /proceedings/micro2015/number1/23705-1742/ },
publisher = {Foundation of Computer Science (FCS), NY, USA},
address = {New York, USA}
}
%0 Proceeding Article
%1 International Conference on Microelectronic Circuit and System
%A Binoy Bera
%T Nanoporous Silicon Prepared by Vapour Phase Strain Etch and Sacrificial Technique
%J International Conference on Microelectronic Circuit and System
%@ 0975-8887
%V MICRO2015
%N 1
%P 42-45
%D 2015
%I International Journal of Computer Applications
Abstract

Porous silicon nanoparticles is a excellent candidates for medical applications as drug delivery devices, for their excellent biocompatibility, biodegradability, and high surface area. In this paper the simple fabrication process of porous silicon by vapour phase strain etch has been observed. The porous silicon nanoparticle has been made by sacrificial technique. This paper also presents the methods of fabrication of porous silicon nanoparticle and measurement of its particle size by dynamic light scattering. Porosity and thickness of porous silicon has been observed by using gravimetric method. Polydispersity index of the dls sample is 0. 22.

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Index Terms

Computer Science
Information Sciences

Keywords

Porous Silicon Vapour Phase Strain Etch Sacrificial Technique Dls Polydispersity Index Biodegradable And Biocompatiable Property.