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10.5120/ijca2017913097 |
Pradeep Chawda. A Simplified Equivalent Circuit Model of MEMS Electrostatic Actuator. International Journal of Computer Applications 160(9):17-23, February 2017. BibTeX
@article{10.5120/ijca2017913097, author = {Pradeep Chawda}, title = {A Simplified Equivalent Circuit Model of MEMS Electrostatic Actuator}, journal = {International Journal of Computer Applications}, issue_date = {February 2017}, volume = {160}, number = {9}, month = {Feb}, year = {2017}, issn = {0975-8887}, pages = {17-23}, numpages = {7}, url = {http://www.ijcaonline.org/archives/volume160/number9/27101-2017913097}, doi = {10.5120/ijca2017913097}, publisher = {Foundation of Computer Science (FCS), NY, USA}, address = {New York, USA} }
Abstract
Modeling a MEMS (Micro Electro-Mechanical Systems) electrostatic actuator in electrical domain is important for system simulation of the actuator along with its associated electronics. For instance, an integrated MEMS resonator used in a serial I/O PLL design modeled in electrical domain enables to optimize the system with the rest of the electronics. In this work, we have developed a simplified equivalent circuit model for MEMS electrostatic actuator and simulated it using Natspice, a U.C. Berkeley SPICE3f5-based in-house circuit simulator. The equations governing the actuator are implemented using coupled RL and RLC circuit, defined in SPICE and Verilog-A. Natspice simulation results are presented and compared with Matlab results which show very high correlation. A system consisting of an array of MEMS devices can be quickly simulated using this simplified model.
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Keywords
Microactuator, Equivalent Circuit, Large Signal, Small Signal