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A Simplified Equivalent Circuit Model of MEMS Electrostatic Actuator

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International Journal of Computer Applications
Foundation of Computer Science (FCS), NY, USA
Volume 160 - Number 9
Year of Publication: 2017
Authors:
Pradeep Chawda
10.5120/ijca2017913097

Pradeep Chawda. A Simplified Equivalent Circuit Model of MEMS Electrostatic Actuator. International Journal of Computer Applications 160(9):17-23, February 2017. BibTeX

@article{10.5120/ijca2017913097,
	author = {Pradeep Chawda},
	title = {A Simplified Equivalent Circuit Model of MEMS Electrostatic Actuator},
	journal = {International Journal of Computer Applications},
	issue_date = {February 2017},
	volume = {160},
	number = {9},
	month = {Feb},
	year = {2017},
	issn = {0975-8887},
	pages = {17-23},
	numpages = {7},
	url = {http://www.ijcaonline.org/archives/volume160/number9/27101-2017913097},
	doi = {10.5120/ijca2017913097},
	publisher = {Foundation of Computer Science (FCS), NY, USA},
	address = {New York, USA}
}

Abstract

Modeling a MEMS (Micro Electro-Mechanical Systems) electrostatic actuator in electrical domain is important for system simulation of the actuator along with its associated electronics. For instance, an integrated MEMS resonator used in a serial I/O PLL design modeled in electrical domain enables to optimize the system with the rest of the electronics. In this work, we have developed a simplified equivalent circuit model for MEMS electrostatic actuator and simulated it using Natspice, a U.C. Berkeley SPICE3f5-based in-house circuit simulator. The equations governing the actuator are implemented using coupled RL and RLC circuit, defined in SPICE and Verilog-A. Natspice simulation results are presented and compared with Matlab results which show very high correlation. A system consisting of an array of MEMS devices can be quickly simulated using this simplified model.

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Keywords

Microactuator, Equivalent Circuit, Large Signal, Small Signal