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Performance Analysis of FD-SOI MOSFET with Different Gate Spacer Dielectric

by Deepesh Ranka, Ashwani K. Rana, Rakesh Kumar Yadav, Devendra Giri
International Journal of Computer Applications
Foundation of Computer Science (FCS), NY, USA
Volume 18 - Number 5
Year of Publication: 2011
Authors: Deepesh Ranka, Ashwani K. Rana, Rakesh Kumar Yadav, Devendra Giri
10.5120/2280-2952

Deepesh Ranka, Ashwani K. Rana, Rakesh Kumar Yadav, Devendra Giri . Performance Analysis of FD-SOI MOSFET with Different Gate Spacer Dielectric. International Journal of Computer Applications. 18, 5 ( March 2011), 22-27. DOI=10.5120/2280-2952

@article{ 10.5120/2280-2952,
author = { Deepesh Ranka, Ashwani K. Rana, Rakesh Kumar Yadav, Devendra Giri },
title = { Performance Analysis of FD-SOI MOSFET with Different Gate Spacer Dielectric },
journal = { International Journal of Computer Applications },
issue_date = { March 2011 },
volume = { 18 },
number = { 5 },
month = { March },
year = { 2011 },
issn = { 0975-8887 },
pages = { 22-27 },
numpages = {9},
url = { https://ijcaonline.org/archives/volume18/number5/2280-2952/ },
doi = { 10.5120/2280-2952 },
publisher = {Foundation of Computer Science (FCS), NY, USA},
address = {New York, USA}
}
%0 Journal Article
%1 2024-02-06T20:05:31.134128+05:30
%A Deepesh Ranka
%A Ashwani K. Rana
%A Rakesh Kumar Yadav
%A Devendra Giri
%T Performance Analysis of FD-SOI MOSFET with Different Gate Spacer Dielectric
%J International Journal of Computer Applications
%@ 0975-8887
%V 18
%N 5
%P 22-27
%D 2011
%I Foundation of Computer Science (FCS), NY, USA
Abstract

As scaling down MOSFET devices degrade device performance in term of leakage current and short channel effects. To overcome the problem a newer device Silicon-on-Insulator (SOI) MOSFET has been introduced. The Fully Depleted (FD) SOI MOSFETs also suffer from short channel effects (SCE) in the sub 65 nm regime due to reduction in threshold voltage. Several investigations are going to reduce the SCE in FD-SOI MOSFET. This work is also facilitating for the improvement of performance of FD-SOI MOSFET using high-k gate spacer dielectric. The results from sentaurus TCAD simulator show that high-k spacer dielectric increases on state driving current and reduces off leakage current due to eminent vertical fringing electric field effect. This fringing field also lessens the SCE such as Drain Induced Barrier Lowering (DIBL), Subthreshold Swing (SS). High-k spacer dielectrics ameliorate the Ion/Ioff, transconductance and voltage gain of the FD-SOI MOSFET compare to the conventional oxide spacer.

References
  1. International technology roadmap for semiconductors, 2009, online at: Itrs.net
  2. Y.K. Choi, K. Asano, N. Lindert, V. Subramanian, T.-J. King, J. Bokor, and C. Hu, “Ultrathin-Body SOI MOSFET for Deep-Sub-Tenth Micron Era”, IEEE Electron Device Letters, vol. 21, no. 5, pp. 254, 2000.
  3. M. Fujiwara, T. Morooka, N. Yasutake, K. Ohuchi, N. Aoki, H. Tanimoto M. Kondo, K. Miyano, S. Inaba, K. Ishimaru, and H. Ishiuchi , “Impact of BOX Scaling on 30 nm Gate Length FD SOI MOSFETs”, IEEE International Conference on SOI, pp. 180-182,Oct 2005.
  4. Ming-Wen Ma, Chien-Hung Wu, Tsung-Yu Yang, Kuo-Hsing Kao, Woei-Cherng Wu, Shui-Jinn Wang, Tien-Sheng Chao and Tan-Fu Lei, “Impact of High-κ Offset Spacer in 65-nm Node SOI Devices”, IEEE Electron device letters, vol. 28, no. 3, Mar. 2007.
  5. R. Tsuchiya, K. Ohnishi, M. Horiuchi, S. Tsujikawa, Y. Shimamoto, N. Inada, J. Yugami, F. Ootsuka, and T. Onai, “Femto-second CMOS Technology with High-κ Offset Spacer and SiN Gate Dielectric with Oxygen enriched Interface,” VLSI Symp. Tech. Dig., Honolulu, HI, pp. 150–151, 2002.
  6. Z. Xiong, H. Liu, C. Zhu, and J. K. O. Sin, “Characteristics of High-κ Spacer Offset-gated Polysilicon TFTs,” IEEE Trans. Electron Devices, vol. 51, no. 8, pp. 1304–1308, Aug. 2004.
  7. D. L. Kencke, W. Chen, H. Wang, S. Mudanai, Q. Ouyang, A. Tasch, and S. K. Banerjee, “Source-side Barrier Effects with Very High-K Dielectrics in 50 nm Si MOSFETs,” Proc. DRC Dig., pp. 22–23,1999.
  8. “Sentaurus Structure Editor User’s Manual”, Synopsys International.
  9. “Sentaurus Inspect User’s Manual”, Synopsys International.
  10. A. Chaudhry and M. Jagadesh Kumar, “Controlling Short-Channel Effects in Deep-Submicron SOI MOSFETs for Improved Reliability: A Review”, IEEE Trans. on device and materials reliability, vol. 4, no. 1, Mar. 2004.
  11. L. Chang, S. Tang, T.-J. King, J. Bokor, and C. Hu, “Gate-length Scaling and Threshold Voltage Control of Double-gate MOSFETs,” Int. Electron Devices Meeting Tech. Dig., pp. 719–722, 2000.
  12. R. R. Troutman, “VLSI Limitation from Drain-Induced Barrier Lowering,” IEEE Trans. Electron Devices, vol. ED-26, pp. 461–469, Apr. 1979.
  13. Y. Cheng, M.-C. Jeng, Z. Liu, J. Huang, M. Chan, K. Chen, P. K. Ko, and C. Hu, “A Physical and Scalable I–V Model in BSIM3v3 for Analog/Digital Circuit Simulation,” IEEE Trans. Electron Devices, vol. 44, pp. 277–287, Feb. 1997.
  14. T. Tsuchiya, Y. Sato, and M. Tomizawa, “Three mechanisms Determining Short-Channel Effects in Fully Depleted SOI MOSFETs,” IEEE Trans. Electron Devices, vol. 45, pp. 1116–1121, May 1998.
  15. D Rechem, S Latreche and C Gontrand, “Channel Length Scaling and the Impact of Metal Gate Work Function on the Performance of Double Gate-Metal Oxide Semiconductor field-effect Transistors”, Pramana J. Phys., vol. 72, no. 3, March 2009.
Index Terms

Computer Science
Information Sciences

Keywords

Silicon-on-Insulator (SOI) high-k spacer dielectric fringing electric field drain induced barrier lowering (DIBL) subthreshold slope (SS)