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Reseach Article

Design and Simulation of Micro-Cantilever Beams for variable capacitor

Published on March 2012 by Yashu A. Cotia, Vivekanand Bhatt
International Conference and Workshop on Emerging Trends in Technology
Foundation of Computer Science USA
ICWET2012 - Number 10
March 2012
Authors: Yashu A. Cotia, Vivekanand Bhatt
a5d6e32c-10fe-41a5-a0da-b3688f322e21

Yashu A. Cotia, Vivekanand Bhatt . Design and Simulation of Micro-Cantilever Beams for variable capacitor. International Conference and Workshop on Emerging Trends in Technology. ICWET2012, 10 (March 2012), 28-32.

@article{
author = { Yashu A. Cotia, Vivekanand Bhatt },
title = { Design and Simulation of Micro-Cantilever Beams for variable capacitor },
journal = { International Conference and Workshop on Emerging Trends in Technology },
issue_date = { March 2012 },
volume = { ICWET2012 },
number = { 10 },
month = { March },
year = { 2012 },
issn = 0975-8887,
pages = { 28-32 },
numpages = 5,
url = { /proceedings/icwet2012/number10/5388-1079/ },
publisher = {Foundation of Computer Science (FCS), NY, USA},
address = {New York, USA}
}
%0 Proceeding Article
%1 International Conference and Workshop on Emerging Trends in Technology
%A Yashu A. Cotia
%A Vivekanand Bhatt
%T Design and Simulation of Micro-Cantilever Beams for variable capacitor
%J International Conference and Workshop on Emerging Trends in Technology
%@ 0975-8887
%V ICWET2012
%N 10
%P 28-32
%D 2012
%I International Journal of Computer Applications
Abstract

Micro-electro-mechanical systems (MEMS) is the integration of mechanical and electrical components that can sense the environment, process and analyze information, and respond in order to control the environment for some desired outcome. MEMS are nowadays becomes increasingly popular due to their high isolation and low insertion loss.The capacitance values of MEMS-based variable capacitors and tuning range are too small, typically less than a few pF. The work presented in this paper involves design, simulation and application of micro-cantilever beam as a variable capacitor. The device consists of array of cantilever beam with variable length, suspended over a bottom electrode. By applying a voltage between the electrodes, the electrostatic force pulls the beams in one-by-one realizing a digital increase in capacitance. The change in length of the beam influences the pull-in voltage while the effect of beam width on the pull-in voltage is negligible

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Index Terms

Computer Science
Information Sciences

Keywords

Digital Variable Capacitor RF MEMS MUMPS