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Reseach Article

Oxidized Macro Porous Silicon based Thermal Isolation in the Design of Microheater for MEMS based Gas Sensors

Published on None 2011 by B.Mondal, M.M.Mahanta, P. Phukan, C. Roychoudhury, H.Saha
International Symposium on Devices MEMS, Intelligent Systems & Communication
Foundation of Computer Science USA
ISDMISC - Number 4
None 2011
Authors: B.Mondal, M.M.Mahanta, P. Phukan, C. Roychoudhury, H.Saha
f7b101c4-2c6c-4407-ae7f-f7906b8f01db

B.Mondal, M.M.Mahanta, P. Phukan, C. Roychoudhury, H.Saha . Oxidized Macro Porous Silicon based Thermal Isolation in the Design of Microheater for MEMS based Gas Sensors. International Symposium on Devices MEMS, Intelligent Systems & Communication. ISDMISC, 4 (None 2011), 7-9.

@article{
author = { B.Mondal, M.M.Mahanta, P. Phukan, C. Roychoudhury, H.Saha },
title = { Oxidized Macro Porous Silicon based Thermal Isolation in the Design of Microheater for MEMS based Gas Sensors },
journal = { International Symposium on Devices MEMS, Intelligent Systems & Communication },
issue_date = { None 2011 },
volume = { ISDMISC },
number = { 4 },
month = { None },
year = { 2011 },
issn = 0975-8887,
pages = { 7-9 },
numpages = 3,
url = { /proceedings/isdmisc/number4/3462-isdm069/ },
publisher = {Foundation of Computer Science (FCS), NY, USA},
address = {New York, USA}
}
%0 Proceeding Article
%1 International Symposium on Devices MEMS, Intelligent Systems & Communication
%A B.Mondal
%A M.M.Mahanta
%A P. Phukan
%A C. Roychoudhury
%A H.Saha
%T Oxidized Macro Porous Silicon based Thermal Isolation in the Design of Microheater for MEMS based Gas Sensors
%J International Symposium on Devices MEMS, Intelligent Systems & Communication
%@ 0975-8887
%V ISDMISC
%N 4
%P 7-9
%D 2011
%I International Journal of Computer Applications
Abstract

Chemical gas sensors suffers from the drawbacks such as high temperature ((>=300oC) and very high power consumption for sensing inflammable gases like CO, CH4 etc. In this work a new technique for thermal isolation in MEMS gas sensors is presented by coupling micromachining of bulk silicon and oxidized macro porous silicon (OMPS) layer to reduce the power consumption. Using oxidized macro porous silicon isolation layer over micromachined silicon substrate complete electrotheral and mechanical design of a simple and effective model of micro-hotplate has been done. Heating element used is Dilver P1 which is an alloy of Fe, Ni, Co. The maximum temperature of 150 oC was achieved a power consumption of 95mW.

References
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Index Terms

Computer Science
Information Sciences

Keywords

Oxidised Macro Porous Silicon Microheater