CFP last date
20 May 2024
Reseach Article

Study and Evaluation of Parameters for High Finish of Germanium Substrates

Published on December 2016 by Rashmi Singh, Harry Garg, B. S. Pabla, Rohit Sharma, Prabhat Bhagel
National Symposium on Modern Information and Communication Technologies for Digital India
Foundation of Computer Science USA
MICTDI2016 - Number 1
December 2016
Authors: Rashmi Singh, Harry Garg, B. S. Pabla, Rohit Sharma, Prabhat Bhagel
5ac346ef-719d-443f-8bde-0b69cedd9088

Rashmi Singh, Harry Garg, B. S. Pabla, Rohit Sharma, Prabhat Bhagel . Study and Evaluation of Parameters for High Finish of Germanium Substrates. National Symposium on Modern Information and Communication Technologies for Digital India. MICTDI2016, 1 (December 2016), 23-26.

@article{
author = { Rashmi Singh, Harry Garg, B. S. Pabla, Rohit Sharma, Prabhat Bhagel },
title = { Study and Evaluation of Parameters for High Finish of Germanium Substrates },
journal = { National Symposium on Modern Information and Communication Technologies for Digital India },
issue_date = { December 2016 },
volume = { MICTDI2016 },
number = { 1 },
month = { December },
year = { 2016 },
issn = 0975-8887,
pages = { 23-26 },
numpages = 4,
url = { /proceedings/mictdi2016/number1/26548-1606/ },
publisher = {Foundation of Computer Science (FCS), NY, USA},
address = {New York, USA}
}
%0 Proceeding Article
%1 National Symposium on Modern Information and Communication Technologies for Digital India
%A Rashmi Singh
%A Harry Garg
%A B. S. Pabla
%A Rohit Sharma
%A Prabhat Bhagel
%T Study and Evaluation of Parameters for High Finish of Germanium Substrates
%J National Symposium on Modern Information and Communication Technologies for Digital India
%@ 0975-8887
%V MICTDI2016
%N 1
%P 23-26
%D 2016
%I International Journal of Computer Applications
Abstract

Optical material has increasingly been used for different applications due to its superior properties. The performance of these is affected by the polishing process and to achieve the better finish. Germanium has desirable properties such as light weight, good thermal conductivity, high strength,excellent infrared refractive index and has civilian applications. The polishing of the Germanium for high finish applications is challenging. Conventional polishing is the most refined finishing processes which target the finest surface. There are different parameters (speed, load, abrasive concentration, pH) which effect the polishing process and it is often required to increase the polishing time in order to improve the roughness and maintain desired surface integrity. This work aims to study the surface roughness of Germaniumby conventional polishing. The DOE technique using Taguchi has been used to optimize the parameters. In this experiment, cerium oxide slurry with different concentration is used with deionised water to polish Germanium on a polyurethane pad. The result indicates that polishing on polyurethane pad with cerium slurry and speed of polisher spindle has significant effect on surface roughness.

References
  1. T. Suratwala, Michael D. feit, Willam A. Steele and Lana L. Wong, "Influence of temperature and material deposit on material removal uniformity during Pad Polishing", J. Am. Ceram. Soc. , 97
  2. , pp. 1720–1727, (2014)
  3. T. Suratwala, Michael D. feit and Willam A. Steele," Toward Deterministic Material Removal andSurface Figure During Fused Silica Pad Polishing", J. Am. Ceram. Soc. , vol. 93
  4. , pp. 1326–1340, (2010)
  5. Wang et al, "Ceria concentration effect on chemical mechanical polishing of optical glass," App. Surface Science, vol. 253, pp. 4951- 4954, (2007).
  6. Y. Li, J. Wang, Q. Xu, W. Yang and Y. Guo, "Effects of velocity and pressure distributions on material removal rate in polishing process," pp. 72820G-72826G, (2009).
  7. Pal, R. K. , Garg, H. , Sarepaka, R. V. , &Karar, V. , "Experimental Investigation of Material Removal and Surface Roughness during Optical Glass Polishing", Materials and Manufacturing Processes, pp. 1-8, (2016).
  8. Hockin H. K. Xu and Lewis K. Ives, "Material removal and damage formation mechanisms in grinding silicon nitride," J. Mater. Res. , vol. 11, no. 7, pp. 1717-1724, (1996).
  9. V. H. Y. LO et al, "The use of Taguchi methods in polishing for quality optimization," International Journal of Reliability, Quality and Safety Engineering, vol. 14, no. 3, pp. 297-309, (2007).
  10. A. C. Landis, "Factors Influencing material removal and surface finish of the polishing of silica glass," (2006).
  11. B. E. Gillman and Stephen D. Jacobs, "Bound-abrasive polishers for optical glass," Applied optics, vol. 37, no. 16, pp. 3498-3505, (1998).
  12. Jainil N Desai, "Advances and processes in Precision Glass Polishing Techniques," University of Florida, (2009).
  13. Zefang Zhang, Weili Liu and Zhitang Song, "Effect of abrasive particle concentration on preliminary chemical mechanical polishing of glass substrate," Microelectronic Engineering 87, pp. 2168–2172 (2010).
  14. Yaguo Li et al, "The Characteristics of Optics polished with a polyurethane pad," Optics express, vol. 16, no. 14, pp. 10285-10293, (2008).
  15. Chen, Y. H. , Tam, S. C. , Chen, W. L. , Zheng, H. Y. , Application of Taguchi method in the optimization of lasers micro material engraving of photo masking. Int. J. Mater. Prod. Technol. 11, pp. 333–334, (1998).
  16. S. Agarwal and P. Venkateswara Rao, "Grinding characteristics, material removal and damage formation mechanisms in high removal rate grinding of silicon carbide," International Journal of Machine Tools and Manufacture, vol. 50, pp. 1077-1087, (2010).
  17. V. K. Jain, "Abrasive Based Nano-Finishing Techniques: An Overview," Machining Science and Technology, vol. 12, pp. 257-294, (2008).
  18. Y. Lee, "Evaluating subsurface damage in optical glasses," Journal of the European Optical Society – Rapidpublications, vol. 6, (2011).
Index Terms

Computer Science
Information Sciences

Keywords

Germanium Polishing Taguchi's Method Surface Roughness